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Browsing by Author "Shimizu, Yasua"

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    Vapor phase doping for ultra shallow juntion formation in advanced Si CMOS devices

    Shimizu, Yasua
    ;
    Nguyen, Duy
    ;
    Jiang, Sijia
    ;
    Rosseel, Erik  
    ;
    Takeuchi, Shotaro
    ;
    Everaert, Jean-Luc
    Meeting abstract
    2010-01, 5th International Workshop on New Group IV Semiconductor Nanoelectronics, 29/01/2010

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