Browsing by Author "Shimokawa, Tsutomu"
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Publication Double patterning process with resist freezing technique
;Hoshiko, Kenji ;Shioya, Takeo ;Fujiwara, Koichi ;Yamaguchi, YoshikazuShimokawa, TsutomuProceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008