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Browsing by Author "Shirke, S."

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    Accurate and reliable optical CD of MuGFET down to 10nm

    Leray, Philippe  
    ;
    Lorusso, Gian  
    ;
    Cheng, Shaunee
    ;
    Collaert, Nadine  
    ;
    Jurczak, Gosia  
    ;
    Shirke, S.
    Proceedings paper
    2007, Metrology, Inspection, and Process Control for Microlithography XXI, 27/02/2007, p.65183B

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