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Browsing by Author "Shogo, Mizota"

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    Development of integrated wet cleans for 3D-SIC technologies

    Suhard, Samuel  
    ;
    Simms, Ihsan
    ;
    Brown, Ian
    ;
    Shogo, Mizota
    ;
    Koji, Kagawa
    ;
    Claes, Martine  
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.150-153

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