Browsing by Author "Siebert, Joerg Max"
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Publication CMP Slurries for germanium substrates in FEOL applications
Meeting abstract2013, International Conference on Planarization/CMP Technology, 30/10/2013Publication Improving defectivity for III-V CMP processes for <10 nm technology nodes
Proceedings paper2014, International Conference on Planarization/CMP Technology, 19/11/2014