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Browsing by Author "Singh, Dhirendra P."

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    Publication

    Isolating the Role of Photoionization for Copolymer Present in Extreme Ultraviolet Photoresists by Gas Phase Electron-Ion Coincidence Experiments

    Sajjadian, Faegheh S.
    ;
    Laffert, Valentin
    ;
    Singh, Dhirendra P.
    ;
    Galleni, Laura  
    ;
    Pollentier, Ivan  
    Journal article
    2025-JAN 14, ACS APPLIED POLYMER MATERIALS

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