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Browsing by Author "Singh, R."

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    Use of surfactants for improved particle performance of dHF-based cleaning recipes

    Vos, Rita  
    ;
    Xu, Kaidong
    ;
    Lux, Marcel  
    ;
    Fyen, Wim
    ;
    Singh, R.
    ;
    Chen, Zhi Yong
    ;
    Mertens, Paul  
    ;
    Hatcher, Z.
    Proceedings paper
    2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.263-266

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