Browsing by Author "Singh, R."
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Publication Use of surfactants for improved particle performance of dHF-based cleaning recipes
; ;Xu, Kaidong; ;Fyen, Wim ;Singh, R. ;Chen, Zhi Yong; Hatcher, Z.Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.263-266