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Browsing by Author "Sinkwitz, Stephan"

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    Progress in 157-nm resist performance and potential

    Wong, Patrick  
    ;
    Sinkwitz, Stephan
    ;
    Hansen, Steven G.
    ;
    Goethals, Mieke
    ;
    Conley, Will
    Proceedings paper
    2002, Advances in Resist Technology and Processing XIX, 4/03/2002, p.512-521

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