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Browsing by Author "Slonaker, S."

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    248 nm lithography for the 0.18 μm generation

    Vandenberghe, Geert  
    ;
    Tzviatkov, Plamen
    ;
    Yen, Anthony
    ;
    Ronse, Kurt  
    ;
    Van den hove, Luc  
    Proceedings paper
    1996, Proceedings of the Microlithography Seminar INTERFACE'96, 27/10/1996, p.29-42

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