Browsing by Author "Smit, Maximilian"
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Publication First results of EUV-scanner compatibility tests performed on novel 'high-NA' reticle absorber materials
;Stortelder, Jetske ;Ebeling, Robert P. ;Rijnsent, Cornevan Putten, MichelProceedings paper2021, International Conference on Extreme Ultraviolet Lithography, SEP 27-OCT 01, 2021, p.1185414