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Browsing by Author "Snijders, H."

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    Plasma nitridation optimization sub-15A gate dielectrics

    Cubaynes, Florence
    ;
    Schmitz, Jurriaan
    ;
    van der marel, C.
    ;
    Snijders, H.
    ;
    Veloso, Anabela  
    Proceedings paper
    2003, Silicon Nitride and Silicon Dioxide Thin Insulating Films VII, 28/04/2003, p.595-604

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