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Browsing by Author "Soberon, Felipe"

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    Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics

    Urbanowicz, Adam
    ;
    Baklanov, Mikhaïl
    ;
    Shamiryan, Denis
    ;
    Soberon, Felipe
    ;
    Daniels, Stephen
    Meeting abstract
    2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008, p.231-232

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