Browsing by Author "Soberon, Felipe"
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics
;Urbanowicz, Adam ;Baklanov, Mikhaïl ;Shamiryan, Denis ;Soberon, FelipeDaniels, StephenMeeting abstract2008, 17th Workshop Materials for Advanced Metallization, 2/03/2008, p.231-232