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Browsing by Author "Sokolov, Andrey"

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    Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range

    Abbasirad, Najmeh
    ;
    Saadeh, Qais
    ;
    Ciesielski, Richard
    ;
    Gottwald, Alexander
    ;
    Philipsen, Vicky  
    Proceedings paper
    2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124963B

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