Browsing by Author "Sokolov, Andrey"
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Publication Optical constants of TiN, amorphous SiO2, and SiN in the extreme ultraviolet range
Journal article2024, Applied Optics, (63) 36, p.9210-9222Publication Precise optical constant determination in the soft X-ray, EUV, and VUV spectral range
Proceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 124963B