Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Somanchi, Anoop"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Innovative metrology for wafer edge defectivity in immersion lithography

    Pollentier, Ivan  
    ;
    Iwamoto, Fumio
    ;
    Kocsis, Michael  
    ;
    Somanchi, Anoop
    ;
    Burkeen, Frank
    Proceedings paper
    2007, Metrology, Inspection and Process Control for Microlithography XXI, 25/02/2007, p.65180T

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings