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Browsing by Author "Somervell, Marc"

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    Feasibility study on dual tone development for frequency doubling

    Bernard, Sophie
    ;
    Fonseca, Carlos
    ;
    Gronheid, Roel  
    ;
    Hatakeyama, Shinichi
    ;
    Leeson, Michael
    Proceedings paper
    2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008

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