Browsing by Author "Sousa, M."

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Fabrication of MBE high-k MOSFETs in a standard CMOS flow

Pantisano, Luigi
;
Conard, Thierry
;
Schram, Tom
;
Deweerd, Wim
;
De Gendt, Stefan
;
Heyns, Marc
Book chapter
2007
Molecular beam epitaxy for advanced gate stack materials and processes

Locquet, Jean-Pierre
;
Marchiori, Chiara
;
Sousa, M.
;
Siegwart, H.
;
Caimi, D.
;
Fompeyrine, Jean
Oral presentation
2005, MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors