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Browsing by Author "Stauss, Sven"

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    Cryogenic approaches to low-damage patterning of porous low-k films

    Iacopi, Francesca
    ;
    Stauss, Sven
    ;
    Terashima, Kazuo
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    2012, Plasma Etch and Strip in Mcroelectronics - PESM, 15/03/2012

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