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Browsing by Author "Stephan, U."

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    Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells

    Dekkers, Harold  
    ;
    De Wolf, Stefaan
    ;
    Agostinelli, Guido
    ;
    Beaucarne, Guy
    ;
    Stahr, F.
    ;
    Stephan, U.
    Proceedings paper
    2004, 19th European Photovoltaic Solar Energy Conference and Exhibition, 7/06/2004, p.982-985

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