Browsing by Author "Stock, Hans-Jurgen"
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Publication Calibrated PSCAR stochastic simulation
;Dinh, Cong Que ;Nagahara, Seji ;Shiraishi, Gousuke ;Minekawa, YukieKamei, YuyaProceedings paper2019, Extreme Ultraviolet (EUV) Lithography X, 24/02/2019, p.109571OPublication Prediction of EUV stochastic microbridge probabilities by lithography simulations
Proceedings paper2020, Extreme Ultraviolet (EUV) Lithography XI, 23/02/2020, p.113230K