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Browsing by Author "Strahan, Jeffrey R."

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    Fluorinated polymethacrylates as highly sensitive nonchemically amplified e-beam resists

    Strahan, Jeffrey R.
    ;
    Adams, Jacob R.
    ;
    Jen, Wei-Lun
    ;
    Vanleenhove, Anja  
    ;
    Neikirk, Colin C.
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 4, p.43011

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