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Browsing by Author "Straka, Joachim"

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    The influence of standing waves on cleaning with a megasonic nozzle

    Janssens, Tom
    ;
    Doumen, Geert  
    ;
    Halder, Sandip  
    ;
    Wostyn, Kurt  
    ;
    Mertens, Paul  
    ;
    Straka, Joachim
    Oral presentation
    2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS

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