Browsing by Author "Strauven, Yvan"

Now showing 1 - 3 of 3

Impact of ceria properties and CMP parameters on STI CMP performance

De Messemaeker, Jo
;
Put, Stijn
;
Nelis, Daniel
;
Van den bosch, Jeroen
;
Strauven, Yvan
;
Lippens, Paul
Proceedings paper
2007, International Conference on Planarization/CMP Technology - ICPT, 25/10/2007, p.303-308
Impact of ceria properties and CMP parameters on STI CMP performance

De Messemaeker, Jo
;
Sinapi, Fabrice
;
Ong, Patrick
;
Put, Stijn
;
Nelis, Daniel
;
Van den bosch, Jeroen
Proceedings paper
2007, Lake Placid CMP Meeting, 13/08/2007
Stabilisation and control of improved nano-ceria dispersions for STI CMP slurries

De Messemaeker, Jo
;
Kellens, Kristof
;
Van Genechten, Dirk
;
Put, Stijn
;
Nelis, Daniel
Proceedings paper
2008, International Conference on Planarization / CMP Technology - ICPT, 10/11/2008