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Browsing by Author "Strunskus, T."

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    Comparative analysis of the nucleation and growth of copper on different low-k polymers

    Zaporojtchenko, V.
    ;
    Erichsen, J.
    ;
    Strunskus, T.
    ;
    Behnke, K.
    ;
    Faupel, F.
    ;
    Baklanov, Mikhaïl
    Proceedings paper
    2002, Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics II, 16/04/2001, p.L8.1

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