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Browsing by Author "Suh, Hyo-Seon"

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    Characterization of directed self-assembly process using grazing incidence small angle X-ray scattering

    Suh, Hyo-Seon
    ;
    Rincon Delgadillo, Paulina  
    ;
    Chen, Xuenxuen
    ;
    Wan, Lingshu
    ;
    Jiang, Zhang
    Oral presentation
    2014, SPIE Advanced Lithography Conference

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