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Browsing by Author "Sun, Jeff"

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    Demonstration of lithography patterns using reflective e-beam direct write

    Freed, Regina
    ;
    Sun, Jeff
    ;
    Brodie, Alan D.
    ;
    Petric, Paul
    ;
    McCord, Marc A.
    ;
    Ronse, Kurt  
    Proceedings paper
    2011, Alternative Lithographic Technologies III, 27/02/2011, p.79701T

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