Browsing by Author "Sutton, Yvonne"

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Advanced etching for nanodevices and 2D materials

de Marneffe, Jean-Francois
;
Cooke, Mike
;
Goodyear, Andy
;
Braithwaite, Nicolas
;
Sutton, Yvonne
Meeting abstract
2016, SNM special session at MNE Conference, 19/09/2016
Ultra low-k etching by neutral beams produced from CF4/Ar and SF6/Ar ICP plasmas

Zotovich, Alexey
;
El Otell, Ziad
;
Sutton, Yvonne
;
Braithwaite, N. St. J.
Meeting abstract
2016, Plasma Etch and Strip in Microtechnology - PESM, 9/05/2016