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Browsing by Author "Takahashi,"

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    Dummy oxide removal in high-K last process integration how to avoid silicon corrosion issue

    Sebaai, Farid  
    ;
    Veloso, Anabela  
    ;
    Takahashi,
    ;
    Pacco, Antoine  
    ;
    Claes, Martine  
    ;
    Schaekers, Marc  
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2013, p.13-16

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