Browsing by Author "Takahashi, H."
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Publication Cleaning aspects of novel materials after CMP
Proceedings paper2011, CMP and Post-CMP Cleaning, 14/03/2011, p.671-676Publication Stack composition dependence of spin wave spectra in magnetic tunnel junction nanopillars
Publication Surface preparation and wet cleaning for germanium surface
Proceedings paper2017, Surface Preparation and Cleaning Conference - SPCC, 28/03/2017, p.170-180