Browsing by Author "Takeshita, Masaru"
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Publication Newly developed positive-tone resists for Posi/Posi double patterning process
;Nakamura, Tsuyoshi ;Takeshita, Masaru ;Maemori, Satoshi ;Uchida, RyusukeTakasu, RyoichiProceedings paper2009, Advances in Resist Materials and Processing Technolgy XXVI, 22/02/2009