Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Tang, Jiuzhou"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Prediction of EUV stochastic microbridge probabilities by lithography simulations

    Verduijn, Erik  
    ;
    Welling, Ulrich  
    ;
    Tang, Jiuzhou
    ;
    Stock, Hans-Jurgen
    ;
    Klostermann, Ulrich
    Proceedings paper
    2020, Extreme Ultraviolet (EUV) Lithography XI, 23/02/2020, p.113230K

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings