Browsing by Author "Tejnil, Edita"
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Publication OPC and Modeling Solution to Support 0.55NA EUV Stitching
Proceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, SEP 30-OCT 03, 2024, p.Art. 1321507Publication OPC and Modeling Solution towards 0.55NA EUV Stitching
Proceedings paper2024, Optical and EUV Nanolithography XXXVII, 2024-02-25, p.129530K