Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Tenner, Manfred"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Characterisation of direct alignment for LFLE process

    Laidler, David  
    ;
    Leray, Philippe  
    ;
    Cheng, Shaunee
    ;
    Doytcheva, Maya
    ;
    Tenner, Manfred
    Proceedings paper
    2009, 6th Internation Symposium on Immersion Lithography Extensions, 22/10/2009

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings