Browsing by Author "Terashima, Kazuo"
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Publication Cryogenic approaches to low-damage patterning of porous low-k films
;Iacopi, Francesca ;Stauss, Sven ;Terashima, KazuoBaklanov, MikhaïlMeeting abstract2012, Plasma Etch and Strip in Mcroelectronics - PESM, 15/03/2012