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    Statistical simulation of resist at EUV and ArF

    Biafore, John
    ;
    Smith, Mark
    ;
    Mack, Chris A.
    ;
    Thackeray, James
    ;
    Gronheid, Roel  
    ;
    Robertson, Stewart
    Proceedings paper
    2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.727319

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