Browsing by Author "Thode, Christopher J."
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Publication All track directed self-assembly of block copolymers: process flow and origin of defects
Proceedings paper2012, Alternative Lithographic Technologies IV, 12/02/2012, p.83230DPublication Towards an all-track 300 mm process for direct self-assembly
Journal article2011, Journal of Vacuum Science and Technology B, (29) 6, p.06F203