Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Thomas, Shawn G."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Strain enhanced NMOS using in situ doped embedded Si1-xCx S/D stressors with up to 1.5% substitutional carbon content grown using a novel deposition process

    Verheyen, Peter  
    ;
    Machkaoutsan, Vladimir  
    ;
    Bauer, Matthias
    ;
    Weeks, Doran
    ;
    Kerner, Christoph  
    Journal article
    2008-06, IEEE Electron Device Letters, (29) 11, p.1206-1208

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings