Browsing by Author "Tien, Ming-Chun"
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Publication Critical pattern behavior at nanometer scale vicinity of black border
Oral presentation2019, 17th Fraunhofer IISB Lithography Simulation WorkshopPublication Stitching enablement for anamorphic imaging: a ~1μm exclusion band and its implications
Proceedings paper2020, Extreme Ultraviolet Lithography 2020, 21/09/2020, p.1151713