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Browsing by Author "Torres, Juan Andres"

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    Publication

    Printability of hard and soft defects in 193-nm lithography

    Philipsen, Vicky  
    ;
    Jonckheere, Rik  
    ;
    Kohlpoth, Stephanie
    ;
    Friedrich, Christoph M.
    Proceedings paper
    2002, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 14/01/2002, p.95-111
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    Understanding design-patterning interactions

    Gupta, Puneet
    ;
    Mallik, Arindam  
    ;
    Torres, Juan Andres
    Oral presentation
    2013, SPIE Course

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