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Browsing by Author "Tower, Joshua"

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    Surface acoustic waves as a technique for in-line detection of processing damage to low-k dielectrics

    Iacopi, Francesca
    ;
    Brongersma, Sywert  
    ;
    Mazurenko, Alexander
    ;
    Struyf, Herbert  
    ;
    Mannaert, Geert  
    Proceedings paper
    2005-06, Proceedings IEEE International Interconnects Technology Conference - IITC, 6/06/2005, p.217-219

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