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Browsing by Author "Tran, H.V."

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    Fluid-photoresist interactions and imaging in high-index immersion lithography

    Tran, H.V.
    ;
    Hendrickx, Eric  
    ;
    Van Roey, Frieda  
    ;
    Vandenberghe, Geert  
    ;
    French, R.H.
    Journal article
    2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, (8) 3, p.33006

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