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Browsing by Author "Tran, Sandra"

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    Implementation of molecular ion implant technology for PMOS extension

    Falepin, Annelies  
    ;
    Collart, Erik
    ;
    Tran, Sandra
    ;
    Harris, Mark
    ;
    Ameen, Mike
    ;
    Hoffmann, Thomas Y.
    Proceedings paper
    2008, 8th International Workshop on Junction Technology - IWJT, 15/05/2008, p.46-48

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