Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Trintchouk, Fedor"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Impact of finite laser bandwidth on the critical dimension of L/S structures

    De Bisschop, Peter  
    ;
    Lalovic, Ivan
    ;
    Trintchouk, Fedor
    Journal article
    2008, Journal of Micro/Nanolithography, MEMS, and MOEMS, (7) 3, p.33001

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings