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Browsing by Author "Urionabarrenetxea, Ainara"

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    All wet strip approaches for post-etch photoresist layers after low-k patterning

    Claes, Martine  
    ;
    Le, Quoc Toan  
    ;
    Kesters, Els  
    ;
    Lux, Marcel  
    ;
    Urionabarrenetxea, Ainara
    Proceedings paper
    2007, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10, 7/10/2007, p.177-187

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