Browsing by Author "Uzunbajakau, Siarhei"
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Publication Sub-32nm half pitch imaging with high NA immersion exposure systems using Double Patterning techniques
;Vleeming, Bert ;Maenhoudt, Mireille ;Quaedackers, John ;van der Heijden, Eddyde Haas, PaulOral presentation2007, 4th International Symposium on Immersion Lithography