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Browsing by Author "Uzunbajakau, Siarhei"

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    Sub-32nm half pitch imaging with high NA immersion exposure systems using Double Patterning techniques

    Vleeming, Bert
    ;
    Maenhoudt, Mireille
    ;
    Quaedackers, John
    ;
    van der Heijden, Eddy
    ;
    de Haas, Paul
    Oral presentation
    2007, 4th International Symposium on Immersion Lithography

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