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Browsing by Author "Van Herp, B."

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    Determination of photoresist degradation products in O-3/DI processing

    Vankerckhoven, H.
    ;
    De Smedt, F.
    ;
    Van Herp, B.
    ;
    Claes, Martine  
    ;
    De Gendt, Stefan  
    ;
    Heyns, Marc  
    Journal article
    2002, Ozone Science and Engineering, (24) 5, p.391-398

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