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Browsing by Author "Van Laer, Koen"

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    Etching of low-k materials for microelectronics applications by means of a N2/H2 plasma: Modeling and experimental investigation

    Samara, Vladimir
    ;
    Van Laer, Koen
    ;
    Tinck, Stefan
    ;
    de Marneffe, Jean-Francois  
    ;
    Bogaerts, Annemie
    Journal article
    2013, Plasma Sources Science and Technology, (22) 2, p.25011

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