Browsing by Author "Van Marcke, Pieter"

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FIB preparation of cross-sectional transmission electron microscopy specimens of unpassivated device structures

Bender, Hugo
;
Van Marcke, Pieter
;
Drijbooms, Chris
;
Roussel, Philippe
Oral presentation
1997, 1st FIB User Group Meeting
Focused ion beam preparation for cross-sectional transmission electron microscopy investigation of the top surface of unpassivated or partially processed ULSI devices

Bender, Hugo
;
Van Marcke, Pieter
;
Drijbooms, Chris
;
Roussel, Philippe
Proceedings paper
1998, Characterization and Metrology for ULSI Technology: 1998 International Conference, 23/03/1998, p.863-867