Browsing by Author "Van Roey, F."

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Recent advancements in 157nm resist performance

Turnquest, K.
;
Graffenberg, V.
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Patel, S.
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Miller, D.
;
Dean, K.
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Goethals, Mieke
;
Van Roey, F.
Oral presentation
2002, 3rd International Symposium on 157nm Lithography
UV2Litho: usable vacuum ultra violet lithography

Goethals, Mieke
;
Jonckheere, Rik
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Van Roey, F.
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Hermans, J.
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Eliat, Astrid
;
Ronse, Kurt
;
Wong, P.
Oral presentation
2002, 3th International Symposium on 157nm Lithography