Browsing by Author "Van Setten, E."

Now showing 1 - 2 of 2

Impact of an etched EUV mask black border on imaging and overlay

Davydova, N.
;
de kruif, R.
;
Fukugami, N.
;
Kondo, S.
;
Philipsen, Vicky
;
Van Setten, E.
;
Connolly, B.
Proceedings paper
2012, Photomask Technology, 10/09/2012, p.852206
Separable models for computational lithography

Liu, Hua-Yu
;
Zhao, Q.
;
Chen, J.F.
;
Jiang, J.
;
Socha, B.
;
Van Setten, E.
;
Engelen, A.
;
Meessen, J.
Proceedings paper
2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70280X