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Browsing by Author "Van der Putte, W."

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    Ex situ bubble generation, enhancing the particle removal rate for single wafer megasonic cleaning processes

    Holsteyns, Frank  
    ;
    Janssens, Tom
    ;
    Arnauts, Sophia  
    ;
    Van der Putte, W.
    ;
    Minsier, Vincent
    ;
    Brunner, J.
    Proceedings paper
    2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.201-204

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